Dielectric properties of thin-film Zr02 up to 50 GHz for RF MEMS switches

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2011, Vol.105 (4), p.867-874
Hauptverfasser:	MIN, Deokki, HOIVIK, Nils, URI JENSEN, Geir, TYHOLDT, Frode, HAAVIK, Camilla, HANKE, Ulrik
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Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric properties of solids and liquids Dielectrics, piezoelectrics, and ferroelectrics and their properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport in interface structures Exact sciences and technology Metal-insulator-metal structures Permittivity (dielectric function) Physics
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source	Springer Nature - Complete Springer Journals
subjects	Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric properties of solids and liquids Dielectrics, piezoelectrics, and ferroelectrics and their properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport in interface structures Exact sciences and technology Metal-insulator-metal structures Permittivity (dielectric function) Physics
title	Dielectric properties of thin-film Zr02 up to 50 GHz for RF MEMS switches
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