Self-Assembled Monolayer-Immobilized Gold Nanoparticles as Durable, Anti-Stiction Coatings for MEMS

Self-assembled monolayer (SAM) films of p-aminophenyl trimethoxysilane (APhTS) and 3-mercaptopropyl trimethoxysilane (MPTS) were used to immobilize gold nanoparticles (AuNPs) on silicon substrates and silicon-based microdevices, which created robust nanoparticle coatings that reduced microstructure...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Journal of microelectromechanical systems 2011-04, Vol.20 (2), p.424-435
Hauptverfasser:	Hurst, K M, Ansari, N, Roberts, C B, Ashurst, W R
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Adhesion tests Adhesives Coatings Cross-disciplinary physics: materials science rheology Exact sciences and technology Gold Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials science Mechanical instruments, equipment and techniques Methods of nanofabrication microelectromechanical devices Micromechanical devices and systems Microstructure Nanoparticles Nanoscale materials and structures: fabrication and characterization Physics reliability Rough surfaces Scanning electron microscopy Self-assembly Silicon Silicon substrates Substrates Surface roughness Surface treatment thin films
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!