Reliability of Suspended Bridges on Superconducting Microstrip Filters Using MEMS Switches

This work proposes to use capacitive micro-electro-mechanical systems (MEMS) switches built on a superconducting microstrip hairpin filter to investigate the reliability of MEMS for long term survivability. This device is made of a YBa 2 Cu 3 O 7 thin film deposited on a 20 mm × 20 mm LaAlO 3 substr...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2011-06, Vol.21 (3), p.567-570
Hauptverfasser:	Vargas, J M, Bogozi, A, Noel, J, Hijazi, Y, Vlasov, Y A, Larkins, Grover L
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Actuation voltage Applied sciences Biomembranes Bridge circuits Bridges (structures) Circuit properties Cryogenic temperature Cryogenics Devices Electric potential Electric, optical and optoelectronic circuits Electrical engineering. Electrical power engineering Electromagnets Electronic circuits ELECTRONIC PRODUCTS Electronics Exact sciences and technology Fabrication Frequency filters Gold MATHEMATICAL ANALYSIS Mathematical models MECHANICAL PROPERTIES MEMS switch Micro- and nanoelectromechanical devices (mems/nems) microstrip hairpin filter Microswitches RESIDUAL STRESS Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices stiction Superconducting devices Superconducting microwave devices SUPERCONDUCTIVITY superconductor SWITCHES THIN FILMS Various equipment and components Young's elastic modulus YTTRIUM OXIDE
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