Modeling, Simulation, and Design Guidelines for Piezoresistive Affinity Cantilevers

This paper presents design guidelines for piezoresistive affinity cantilevers for operation in liquid environments. For the first time, we consider the interdependence of various functional elements (such as biological, mechanical, and electrical) of the cantilever, their dependence on material choi...

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Veröffentlicht in:	Journal of microelectromechanical systems 2011-06, Vol.20 (3), p.774-784
Hauptverfasser:	Joshi, M, Gandhi, P S, Lal, R, Rao, V R, Mukherji, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Affinity Affinity cantilever Applied sciences Biological and medical sciences Biosensors Biotechnology Computer simulation Design engineering Estimates Exact sciences and technology Fundamental and applied biological sciences. Psychology Guidelines Liquids Materials selection Mathematical analysis Mechanical engineering. Machine design Methods. Procedures. Technologies Molecular biophysics nonlinear Piezoresistance piezoresistive Precision engineering, watch making Sensitivity Signal to noise ratio Silicon Silicon nitride Stress Studies Various methods and equipments
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