CMOS-MEMS 3-bit Digital Capacitors With Tuning Ratios Greater Than 60:1

3-bit microelectromechanical systems digital capacitors with greater than 60:1 tuning ratios are monolithically integrated with CMOS using a post-CMOS fabrication process. The digital capacitors are composed of many switched capacitors in parallel, which use a combination of vertical (out-of-plane)...

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Veröffentlicht in:	IEEE transactions on microwave theory and techniques 2011-05, Vol.59 (5), p.1238-1248
Hauptverfasser:	Reinke, J, Fedder, G K, Mukherjee, T
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Actuators Applied sciences Capacitance capacitive microelectromechanical systems (MEMS) switches Capacitors Circuit properties CMOS Design. Technologies. Operation analysis. Testing Dielectric, amorphous and glass solid devices Digital Electric, optical and optoelectronic circuits Electrodes Electronic circuits Electronics Electrostatics Exact sciences and technology Integrated circuits integrated systems Metals Micro- and nanoelectromechanical devices (mems/nems) microelectromechanical systems (MEMS) Micromechanical devices Microwaves Quality factor reconfigurable circuits RF MEMS Rotors Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Switching, multiplexing, switched capacity circuits Tuning
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