Perspectives on atmospheric-pressure plasmas for nanofabrication

Low-pressure, low-temperature plasmas are widely used for materials applications in industries ranging from electronics to medicine. To avoid the high costs associated with vacuum equipment, there has always been a strong motivation to operate plasmas at higher pressures, up to atmospheric. However,...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2011-05, Vol.44 (17), p.174023
Hauptverfasser:	Mariotti, Davide, Sankaran, R Mohan
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology High-pressure and shock-wave effects in solids and liquids Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Materials science Mechanical and acoustical properties of condensed matter Nanocrystalline materials Nanopowders Nanoscale materials and structures: fabrication and characterization Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
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