Simultaneous measurement of six layers in a silicon on insulator film stack using visible-near-IR spectrophotometry and single-wavelength beam profile reflectometry

Bibliographische Detailangaben

Hauptverfasser:	LENG, J. M, SIDOROWICH, J. J, SENKO, M, OPSAL, J
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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