Micro-Fabricated Electromagnetic Power Generator to Scavenge Low Ambient Vibration
In this paper, micro-fabricated electromagnetic power generator is presented to convert the low level ambient vibration into electric energy. The proposed micro-power generator is comprised of three micro-components such as bulk-micromachined silicon spiral spring, low loss copper micro-coil, and Nd...
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| Veröffentlicht in: | IEEE transactions on magnetics 2010-06, Vol.46 (6), p.1937-1942 |
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| container_title | IEEE transactions on magnetics |
| container_volume | 46 |
| creator | Park, Jong Cheol Bang, Dong Hyun Park, Jae Yeong |
| description | In this paper, micro-fabricated electromagnetic power generator is presented to convert the low level ambient vibration into electric energy. The proposed micro-power generator is comprised of three micro-components such as bulk-micromachined silicon spiral spring, low loss copper micro-coil, and NdFeB magnet to be assembled with low cost PDMS packaging substrate. In order to maximize the output power, magnet is applied as inertial mass at the center of silicon spiral spring to adjust its resonant frequency. Especially, NdFeB discrete/miniaturized magnet and copper wire wounded micro-coil were utilized to avoid the performance deterioration of the proposed device due to its miniaturization. It was specially designed for scavenging low ambient vibration of several tens of hertz and low acceleration under 1g. The fabricated device generated output power of 115.1 W and load voltage of 68.2 mV to the load resistance of 18.1 from the vibration of 54 Hz with acceleration of 0.57 g. The normalized power density was 590.4 ¿W/cm 3 g 2 . |
| doi_str_mv | 10.1109/TMAG.2010.2044757 |
| format | Article |
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The proposed micro-power generator is comprised of three micro-components such as bulk-micromachined silicon spiral spring, low loss copper micro-coil, and NdFeB magnet to be assembled with low cost PDMS packaging substrate. In order to maximize the output power, magnet is applied as inertial mass at the center of silicon spiral spring to adjust its resonant frequency. Especially, NdFeB discrete/miniaturized magnet and copper wire wounded micro-coil were utilized to avoid the performance deterioration of the proposed device due to its miniaturization. It was specially designed for scavenging low ambient vibration of several tens of hertz and low acceleration under 1g. The fabricated device generated output power of 115.1 W and load voltage of 68.2 mV to the load resistance of 18.1 from the vibration of 54 Hz with acceleration of 0.57 g. The normalized power density was 590.4 ¿W/cm 3 g 2 .</description><identifier>ISSN: 0018-9464</identifier><identifier>EISSN: 1941-0069</identifier><identifier>DOI: 10.1109/TMAG.2010.2044757</identifier><identifier>CODEN: IEMGAQ</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Acceleration ; Ambient vibrations ; Assembly ; Copper ; Costs ; Cross-disciplinary physics: materials science; rheology ; Density ; Devices ; Electric power generation ; electromagnetic ; energy harvesting ; Exact sciences and technology ; Generators ; Magnetic resonance ; Magnetism ; Materials science ; microelectromechanical devices ; Other topics in materials science ; Packaging ; Physics ; Power generation ; power generator ; Silicon ; Silicon substrates ; Spiral springs ; Spirals ; Springs ; Vibration</subject><ispartof>IEEE transactions on magnetics, 2010-06, Vol.46 (6), p.1937-1942</ispartof><rights>2015 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Jun 2010</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c469t-d28ff084ccb920125b6aae734625518eb1b0416d2d7941bc1ba12e3a431326b23</citedby><cites>FETCH-LOGICAL-c469t-d28ff084ccb920125b6aae734625518eb1b0416d2d7941bc1ba12e3a431326b23</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5467542$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,314,776,780,785,786,792,23909,23910,25118,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5467542$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=23118816$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Park, Jong Cheol</creatorcontrib><creatorcontrib>Bang, Dong Hyun</creatorcontrib><creatorcontrib>Park, Jae Yeong</creatorcontrib><title>Micro-Fabricated Electromagnetic Power Generator to Scavenge Low Ambient Vibration</title><title>IEEE transactions on magnetics</title><addtitle>TMAG</addtitle><description>In this paper, micro-fabricated electromagnetic power generator is presented to convert the low level ambient vibration into electric energy. The proposed micro-power generator is comprised of three micro-components such as bulk-micromachined silicon spiral spring, low loss copper micro-coil, and NdFeB magnet to be assembled with low cost PDMS packaging substrate. In order to maximize the output power, magnet is applied as inertial mass at the center of silicon spiral spring to adjust its resonant frequency. Especially, NdFeB discrete/miniaturized magnet and copper wire wounded micro-coil were utilized to avoid the performance deterioration of the proposed device due to its miniaturization. It was specially designed for scavenging low ambient vibration of several tens of hertz and low acceleration under 1g. The fabricated device generated output power of 115.1 W and load voltage of 68.2 mV to the load resistance of 18.1 from the vibration of 54 Hz with acceleration of 0.57 g. The normalized power density was 590.4 ¿W/cm 3 g 2 .</description><subject>Acceleration</subject><subject>Ambient vibrations</subject><subject>Assembly</subject><subject>Copper</subject><subject>Costs</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Density</subject><subject>Devices</subject><subject>Electric power generation</subject><subject>electromagnetic</subject><subject>energy harvesting</subject><subject>Exact sciences and technology</subject><subject>Generators</subject><subject>Magnetic resonance</subject><subject>Magnetism</subject><subject>Materials science</subject><subject>microelectromechanical devices</subject><subject>Other topics in materials science</subject><subject>Packaging</subject><subject>Physics</subject><subject>Power generation</subject><subject>power generator</subject><subject>Silicon</subject><subject>Silicon substrates</subject><subject>Spiral springs</subject><subject>Spirals</subject><subject>Springs</subject><subject>Vibration</subject><issn>0018-9464</issn><issn>1941-0069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkE1LAzEQQIMoWKs_QLwsiHjamskm2d1jKVqFFkWr1yVJZ0vKdlOTrcV_b0pLD56GYd58PUKugQ4AaPkwmw7HA0ZjyijnuchPSA9KDimlsjwlPUqhSEsu-Tm5CGEZUy6A9sj71Brv0ielvTWqw3ny2KDpvFupRYudNcmb26JPxtiiV53zSeeSD6N-sF1gMnHbZLjSFtsu-bI6Ata1l-SsVk3Aq0Psk8-nx9noOZ28jl9Gw0lquCy7dM6KuqYFN0aX8XAmtFQK84xLJgQUqEFTDnLO5nn8QxvQChhmimeQMalZ1if3-7lr7743GLpqZYPBplEtuk2oCiFkySIdydt_5NJtfBuPq4CyPHriWREp2FNRSAge62rt7Ur53whVO8nVTnK1k1wdJMeeu8NkFYxqaq9aY8OxMW6HogAZuZs9ZxHxWBZc5oKz7A9N74Oo</recordid><startdate>20100601</startdate><enddate>20100601</enddate><creator>Park, Jong Cheol</creator><creator>Bang, Dong Hyun</creator><creator>Park, Jae Yeong</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20100601</creationdate><title>Micro-Fabricated Electromagnetic Power Generator to Scavenge Low Ambient Vibration</title><author>Park, Jong Cheol ; Bang, Dong Hyun ; Park, Jae Yeong</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c469t-d28ff084ccb920125b6aae734625518eb1b0416d2d7941bc1ba12e3a431326b23</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Acceleration</topic><topic>Ambient vibrations</topic><topic>Assembly</topic><topic>Copper</topic><topic>Costs</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Density</topic><topic>Devices</topic><topic>Electric power generation</topic><topic>electromagnetic</topic><topic>energy harvesting</topic><topic>Exact sciences and technology</topic><topic>Generators</topic><topic>Magnetic resonance</topic><topic>Magnetism</topic><topic>Materials science</topic><topic>microelectromechanical devices</topic><topic>Other topics in materials science</topic><topic>Packaging</topic><topic>Physics</topic><topic>Power generation</topic><topic>power generator</topic><topic>Silicon</topic><topic>Silicon substrates</topic><topic>Spiral springs</topic><topic>Spirals</topic><topic>Springs</topic><topic>Vibration</topic><toplevel>online_resources</toplevel><creatorcontrib>Park, Jong Cheol</creatorcontrib><creatorcontrib>Bang, Dong Hyun</creatorcontrib><creatorcontrib>Park, Jae Yeong</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on magnetics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Park, Jong Cheol</au><au>Bang, Dong Hyun</au><au>Park, Jae Yeong</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Micro-Fabricated Electromagnetic Power Generator to Scavenge Low Ambient Vibration</atitle><jtitle>IEEE transactions on magnetics</jtitle><stitle>TMAG</stitle><date>2010-06-01</date><risdate>2010</risdate><volume>46</volume><issue>6</issue><spage>1937</spage><epage>1942</epage><pages>1937-1942</pages><issn>0018-9464</issn><eissn>1941-0069</eissn><coden>IEMGAQ</coden><abstract>In this paper, micro-fabricated electromagnetic power generator is presented to convert the low level ambient vibration into electric energy. The proposed micro-power generator is comprised of three micro-components such as bulk-micromachined silicon spiral spring, low loss copper micro-coil, and NdFeB magnet to be assembled with low cost PDMS packaging substrate. In order to maximize the output power, magnet is applied as inertial mass at the center of silicon spiral spring to adjust its resonant frequency. Especially, NdFeB discrete/miniaturized magnet and copper wire wounded micro-coil were utilized to avoid the performance deterioration of the proposed device due to its miniaturization. It was specially designed for scavenging low ambient vibration of several tens of hertz and low acceleration under 1g. The fabricated device generated output power of 115.1 W and load voltage of 68.2 mV to the load resistance of 18.1 from the vibration of 54 Hz with acceleration of 0.57 g. The normalized power density was 590.4 ¿W/cm 3 g 2 .</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/TMAG.2010.2044757</doi><tpages>6</tpages></addata></record> |
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| source | IEEE Electronic Library (IEL) |
| subjects | Acceleration Ambient vibrations Assembly Copper Costs Cross-disciplinary physics: materials science rheology Density Devices Electric power generation electromagnetic energy harvesting Exact sciences and technology Generators Magnetic resonance Magnetism Materials science microelectromechanical devices Other topics in materials science Packaging Physics Power generation power generator Silicon Silicon substrates Spiral springs Spirals Springs Vibration |
| title | Micro-Fabricated Electromagnetic Power Generator to Scavenge Low Ambient Vibration |
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