The influence of C2H2 and dust formation on the time dependence of metastable argon density in pulsed plasmas

Diode laser absorption at 772.38 nm is used to measure the time resolved density of Ar* (3P2) metastable atoms in a capacitively coupled radio-frequency (RF) discharge running in an argon/acetylene mixture at 0.1 mbar. The RF power is pulsed at 100 Hz and the density of Ar* (3P2) atoms in the 5 ms O...

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 2010-04, Vol.43 (15), p.152003-152003
Hauptverfasser: Stefanović, Ilija, Sadeghi, Nader, Winter, Jörg
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Sprache:eng
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