Patterning and growth of carbon nanotubes on a highly structured 3D substrate surface

This study demonstrates the patterning and growth of carbon nanotubes (CNTs) on a highly structured three-dimensional (3D) substrate surface and even underneath the suspended microstructure surface. Three key processes-plasma surface treatment, self-assembled monolayer (SAM) coating and contact disp...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2009-10, Vol.19 (10), p.105009-105009 (7)
Hauptverfasser:	Su, Wang-Shen, Lin, Chia-Min, Chen, Ting-Hsien, Fang, Weileun
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials science Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Methods of nanofabrication Micromechanical devices and systems Nanoscale materials and structures: fabrication and characterization Physics Precision engineering, watch making
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