High Quality SiO2-like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

This work reports on the main competing processes and their contribution to the properties of SiO2 layers on polymers in large area AP‐PE‐CVD from ArN2O2‐HMDSO mixtures. The detailed space resolved surface analysis on the statically deposited films showed smooth SiOx films in the vicinity of the g...

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Veröffentlicht in:	Plasma processes and polymers 2009-10, Vol.6 (10), p.693-702
Hauptverfasser:	Premkumar, Peter Antony, Starostin, Sergey A., de Vries, Hindrik, Paffen, Roger M. J., Creatore, Mariadriana, Eijkemans, Tom J., Koenraad, Paul M., de Sanden, Mauritius C. M. van
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences atmospheric pressure glow discharges (APGD) atomic force microscopy (AFM) Coating, metallization, dyeing dielectric barrier discharges (DBD) Exact sciences and technology hexamethyldisiloxane (HMDSO) Machinery and processing Plastics Polymer industry, paints, wood roll-to-roll reactor Technology of polymers
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