Development of Microfabricated Cylindrical Ion Trap Mass Spectrometer Arrays

A novel approach, in which microelectromechanical systems (MEMS) technology is used for constructing miniature cylindrical ion trap (CIT) mass spectrometer (MS) arrays in silicon (Si), is described. MEMS processes were used to fabricate precise CIT geometries in a stack of Si, SiO 2 , and Si 3 N 4 ....

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Veröffentlicht in:	Journal of microelectromechanical systems 2009-04, Vol.18 (2), p.442-448
Hauptverfasser:	Chaudhary, A., van Amerom, F., Short, R.T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Apertures Arrays Chromium Cylindrical ion trap (CIT) deep reactive ion etching (DRIE) Electron beams Electron traps Exact sciences and technology Geometry Gold Instability Instruments, apparatus, components and techniques common to several branches of physics and astronomy Ionization mass spectrometer (MS) Mass spectrometers Mass spectrometry Mass spectroscopy Mechanical instruments, equipment and techniques metal-coated ion optics Microelectromechanical systems Micromechanical devices Micromechanical devices and systems miniaturization Physics Silicon
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