Characterization of Parylene-N as Flexible Substrate and Passivation Layer for Microwave and Millimeter-Wave Integrated Circuits

Investigation of Parylene-N (Pa-N) as a flexible substrate, multilayer dielectric material, and passivation layer for microwave and millimeter-wave integrated circuits is presented. For the first time, the electrical properties of Parylene-N have been characterized up to 60 GHz using various microst...

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Veröffentlicht in:	IEEE transactions on advanced packaging 2009-02, Vol.32 (1), p.84-92
Hauptverfasser:	Sharifi, H., Lahiji, R.R., Han-Chung Lin, Ye, P.D., Katehi, L.P.B., Mohammadi, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Dielectric characterization Dielectric loss measurement Dielectric measurements Dielectric substrates Electric, optical and optoelectronic circuits Electronic circuits Electronic equipment and fabrication. Passive components, printed wiring boards, connectics Electronics Exact sciences and technology Frequency Gallium arsenide Insertion loss Integrated circuits Loss measurement microwave and millimeter-wave integrated circuit Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Microwaves Millimeter wave integrated circuits Optical ring resonators Oscillators, resonators, synthetizers Parylene Passivation R&D Relative humidity Research & development Resonators ring resonators Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors Transistors Transmission line measurements Transmission lines
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