Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

The fabrication using silicon micromachining and characterization of an acoustic Lamb wave actuator is presented. The intended use of the device is for mass transport and sensor applications. The device consists of dual interdigitated transducers patterned on a thin-film composite membrane of silico...

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Veröffentlicht in:	Journal of microelectromechanical systems 1997-12, Vol.6 (4), p.337-346
Hauptverfasser:	Luginbuhl, P., Collins, S.D., Racine, G.-A., Gretillat, M.-A., De Rooij, N.F., Brooks, K.G., Setter, N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic devices Acoustic waves Actuators Applied sciences Exact sciences and technology Fabrication Mechanical engineering. Machine design Micromachining Piezoelectric films Piezoelectric transducers Precision engineering, watch making Semiconductor thin films Silicon Thin film devices
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