A study of angular effects in focused ion beam milling of water ice
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| Veröffentlicht in: | Journal of micromechanics and microengineering 2008-09, Vol.18 (9), p.095010 |
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| container_issue | 9 |
| container_start_page | 095010 |
| container_title | Journal of micromechanics and microengineering |
| container_volume | 18 |
| creator | Fu, Jing Joshi, Sanjay B Catchmark, Jeffrey M |
| description | |
| doi_str_mv | 10.1088/0960-1317/18/9/095010 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0960-1317 |
| ispartof | Journal of micromechanics and microengineering, 2008-09, Vol.18 (9), p.095010 |
| issn | 0960-1317 1361-6439 |
| language | eng |
| recordid | cdi_pascalfrancis_primary_20663005 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices |
| title | A study of angular effects in focused ion beam milling of water ice |
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