Retardation of boron diffusion in SiGe alloy

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Hauptverfasser:	BANG, Junhyeok, KIM, Hanchul, KANG, Joongoo, LEE, Woo-Jin, CHANG, K. J
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Diffusion in solids Diffusion of impurities Exact sciences and technology Physics Transport properties of condensed matter (nonelectronic)
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creator	BANG, Junhyeok KIM, Hanchul KANG, Joongoo LEE, Woo-Jin CHANG, K. J
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source	Elsevier ScienceDirect Journals
subjects	Condensed matter: structure, mechanical and thermal properties Diffusion in solids Diffusion of impurities Exact sciences and technology Physics Transport properties of condensed matter (nonelectronic)
title	Retardation of boron diffusion in SiGe alloy
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