Study of CoNbFe films deposited by DC magnetron sputtering

CoNbFe films were deposited by DC multisource sputtering and unbalanced DC single-magnetron sputtering. The film structures and magnetic properties were studied as a function of film composition and deposition parameters. Transmission electron microscopy study of the film structure and the measureme...

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Veröffentlicht in:	IEEE transactions on magnetics 1991-01, Vol.27 (1), p.664-668
Hauptverfasser:	Pan, G., Spencer, A.G., Howson, R.P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous magnetic materials Applied sciences Condensed matter: electronic structure, electrical, magnetic, and optical properties Conductivity Exact sciences and technology Iron Magnetic anisotropy Magnetic films Magnetic properties Magnetic properties and materials Magnetic properties of surface, thin films and multilayers Metals. Metallurgy Niobium Perpendicular magnetic anisotropy Physics Sputtering Transmission electron microscopy
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