A thermal inkjet printhead with a monolithically fabricated nozzle plate and self-aligned ink feed hole

A monolithic thermal inkjet printhead has been developed and demonstrated to operate successfully by combining monolithic growing of a nozzle plate on the silicon substrate and electrochemical etching of silicon for an ink feed hole. For the monolithic fabrication, a multiexposure and single develop...

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Veröffentlicht in:	Journal of microelectromechanical systems 1999-09, Vol.8 (3), p.229-236
Hauptverfasser:	LEE, J.-D, YOON, J.-B, KIM, J.-K, CHUNG, H.-J, LEE, C.-S, LEE, H.-D, LEE, H.-J, KIM, C.-K, HAN, C.-H
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Colored noise Costs Current pulses Electrochemical etching Electronics Electroplating Etching Exact sciences and technology Fabrication Feeds Hardware Holes Ink Input-output equipment Mechanical engineering. Machine design Microelectronic fabrication (materials and surfaces technology) Nickel Nozzles Photoresists Precision engineering, watch making Printers Printing Resists Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon Silicon substrates
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