Design and performance test of a MEMS vibratory gyroscope with a novel AGC force rebalance control

In this paper, the development and performance test results of a laterally oscillating MEMS gyroscope using a novel force rebalance control strategy are presented. The micromachined structure and electrodes are fabricated using the deep reactive ion etching (DRIE) and anodic wafer bonding process. T...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2007-10, Vol.17 (10), p.1939-1948
Hauptverfasser:	Sung, Woon-Tahk, Sung, Sangkyung, Lee, Jang Gyu, Kang, Taesam
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Measurements common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Metrology, measurements and laboratory procedures Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Velocity, acceleration and rotation
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