Characterization of the performance of capacitive switches activated by mechanical shock

This paper presents experimental and theoretical investigation of a new concept of switches (triggers) that are actuated at or beyond a specific level of mechanical shock or acceleration. The principle of operation of the switches is based on dynamic pull-in instability induced by the combined inter...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2007-07, Vol.17 (7), p.1360-1370
Hauptverfasser:	Younis, Mohammad I, Alsaleem, Fadi M, Miles, Ronald, Su, Quang
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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