Low substrate temperature and low As-pressure growth concept for the molecular beam epitaxial growth of 1.55 μ m (Ga,In)(N,As) multiple quantum wells

We investigate the molecular beam epitaxial growth (MBE) of (Ga,In)(N,As) multiple quantum wells at a low substrate temperature and under low As pressure. The advantages of this growth concept to achieve 1.55 μ m emissions are as follows: (i) the low growth temperature prevents composition modulatio...

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Veröffentlicht in:Journal of crystal growth 2007-04, Vol.301, p.529-533
Hauptverfasser: Ishikawa, Fumitaro, Trampert, Achim, Ploog, Klaus H.
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Trampert, Achim
Ploog, Klaus H.
description We investigate the molecular beam epitaxial growth (MBE) of (Ga,In)(N,As) multiple quantum wells at a low substrate temperature and under low As pressure. The advantages of this growth concept to achieve 1.55 μ m emissions are as follows: (i) the low growth temperature prevents composition modulations, leading to abrupt heterointerfaces; (ii) the low As pressure allows the introduction of a large amount of N in the layers due to the reduced competition for incorporation of group V elements; (iii) reducing the As pressure counteracts the effect of the low growth temperature, thus improving photoluminescence intensity. With this concept, (Ga,In)(N,As) quantum well emitting at 1.55 μ m are successfully grown in two MBE systems, equipped with different As source configurations.
doi_str_mv 10.1016/j.jcrysgro.2006.09.009
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subjects A3. Molecular beam epitaxy
A3. Semiconducting III–V materials
B3. Solid state lasers
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Growth from vapor
Materials science
Methods of crystal growth
physics of crystal growth
Methods of deposition of films and coatings
film growth and epitaxy
Molecular, atomic, ion, and chemical beam epitaxy
Nanoscale materials and structures: fabrication and characterization
Physics
Quantum wells
Theory and models of film growth
title Low substrate temperature and low As-pressure growth concept for the molecular beam epitaxial growth of 1.55 μ m (Ga,In)(N,As) multiple quantum wells
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