Structure and photoluminescence properties of Fe-doped ZnO thin films

Zn1-xFexO films were prepared by the radio-frequency (rf) magnetron sputtering technique on n-Si substrates with a composite target of a ceramic polycrystalline ZnO containing several Fe pieces on the surface. X-ray photoelectron spectroscopy study of the Zn1-xFexO films shows that Fe in the as-depo...

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 2006-11, Vol.39 (22), p.4762-4765
Hauptverfasser: Chen, A J, Wu, X M, Sha, Z D, Zhuge, L J, Meng, Y D
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container_issue 22
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container_title Journal of physics. D, Applied physics
container_volume 39
creator Chen, A J
Wu, X M
Sha, Z D
Zhuge, L J
Meng, Y D
description Zn1-xFexO films were prepared by the radio-frequency (rf) magnetron sputtering technique on n-Si substrates with a composite target of a ceramic polycrystalline ZnO containing several Fe pieces on the surface. X-ray photoelectron spectroscopy study of the Zn1-xFexO films shows that Fe in the as-deposited film exists mainly in the form of Fe2+. And x-ray diffraction spectra show that all the films exhibited c-axis orientation. The room temperature photoluminescence (PL) properties of the Zn1-xFexO films were also discussed. Two obvious PL peaks appear at 378 nm and 414 nm, respectively. It is interesting that there is a tendency of redshift for the peak at 378 nm and that the PL intensity increases slightly for the peak at 414 nm as the Fe concentration increases. Discussions have been given to explain the different phenomena.
doi_str_mv 10.1088/0022-3727/39/22/004
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subjects Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Other semiconductors
Physics
title Structure and photoluminescence properties of Fe-doped ZnO thin films
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