Characterization and Properties of Ge1-x-Cx:H Compounds Obtained by X-ray CVD of Germane/Ethyne Systems: Effect of the Irradiation Dose

Amorphous germanium carbides have been prepared by X‐ray activated CVD from germane/ethyne systems containing from 10 % to 80 % of ethyne. The effects of the dosage on the composition, characteristics, and properties of the solids obtained have been investigated. The composition of the material is f...

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Veröffentlicht in:Chemical vapor deposition 2006-01, Vol.12 (1), p.25-32
Hauptverfasser: Benzi, P., Bottizzo, E., Demaria, C.
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description Amorphous germanium carbides have been prepared by X‐ray activated CVD from germane/ethyne systems containing from 10 % to 80 % of ethyne. The effects of the dosage on the composition, characteristics, and properties of the solids obtained have been investigated. The composition of the material is found to change depending on both the ethyne percentage in the mixture and the irradiation time. Electron paramagnetic resonance (EPR), X‐ray diffraction (XRD) analysis, and infrared spectroscopy (IRS) results indicate that the solids are formed by a randomly bound network of carbon and germanium atoms with hydrogen atoms terminating all the dangling bonds. Optical gap values higher than 3.0 eV, and increasing with the carbon molar fraction of the solid, have been found. Hydrogenated germanium‐carbon alloys have been obtained from X‐ray radiolysis of GeH4/C2H2 systems. Their morphology, bonding, structure, and optical properties have been investigated as a function of the irradiation time. The solids are formed by a randomly bound network of carbon and germanium atoms with hydrogen atoms terminating all the dangling bonds (see Figure).
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source Wiley Blackwell Journals
subjects Alloys
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Germanium carbide
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
title Characterization and Properties of Ge1-x-Cx:H Compounds Obtained by X-ray CVD of Germane/Ethyne Systems: Effect of the Irradiation Dose
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