FSS array generation by optical means

We have demonstrated a basic technique for optically generating arrays of periodic grids as a pseudo-metallic, electron-hole plasma region within a semiconductor wafer. The wafers used were high resistivity silicon to give dielectric-like dark behaviour, in order to contrast with the generated plasm...

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Hauptverfasser:	Lockyer, D.S, Vardaxoglou, J.C, Kearney, M.J
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Antenna arrays Antennas Applied sciences Electronics Exact sciences and technology Lithography (semiconductor technology) Microelectronic fabrication (materials and surfaces technology) Radiocommunications Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Telecommunications Telecommunications and information theory
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creator	Lockyer, D.S Vardaxoglou, J.C Kearney, M.J
description	We have demonstrated a basic technique for optically generating arrays of periodic grids as a pseudo-metallic, electron-hole plasma region within a semiconductor wafer. The wafers used were high resistivity silicon to give dielectric-like dark behaviour, in order to contrast with the generated plasma. The theory of the work is based on the characterisation of the plasma by means of its surface impedance, which in turn is dependent on the complex permittivity. We have demonstrated theoretically, generation dimensions. Results have been presented in the frequency range 18-40 GHz to confirm that grids have been optically cast onto the wafers using negative image masks of the desired pattern.
doi_str_mv	10.1049/cp:19990034
format	Conference Proceeding
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identifier	ISSN: 0537-9989
ispartof	IEE National Conference on Antennas and Propagation, 1999, p.132-135
issn	0537-9989
language	eng
recordid	cdi_pascalfrancis_primary_1821452
source	IEEE Electronic Library (IEL) Conference Proceedings
subjects	Antenna arrays Antennas Applied sciences Electronics Exact sciences and technology Lithography (semiconductor technology) Microelectronic fabrication (materials and surfaces technology) Radiocommunications Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Telecommunications Telecommunications and information theory
title	FSS array generation by optical means
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