Lateral nano-Newton force-sensing piezoresistive cantilever for microparticle handling

A lateral force-sensing piezoresistive cantilever is presented that can be used to evaluate the impact force between micro-handling tools and microparticles in the nano-Newton range. The 500 nm thick piezoresistive sensors are made from epitaxial silicon on single crystal silicon. The cantilevers ar...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2006-06, Vol.16 (6), p.S102-S106
Hauptverfasser:	Chu Duc, T, Creemer, J F, Sarro, P M
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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