Isolating failure location by using a dynamic emission microscopy system -a specific IddQ fail case study

The purpose of this paper is to present a novel failure analysis application of a dynamic emission microscopy system, which is implemented by photoemission microscopy coupled with a logic tester and corresponding software. The system not only filtered out spurious hot spots that would mislead analys...

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Hauptverfasser:	SHEN, Cha-Ming, CHEN, Chien-Hui
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied sciences Computer aided software engineering Current measurement Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology Failure analysis Integrated circuits Logic testing Microscopy Phase measurement Photoelectricity Semiconductor device manufacture Semiconductor device measurement Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices System testing Testing, measurement, noise and reliability
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