Fluorine analysis and microstructural evolution in coated YBCO conductor deposited by metal trifluoroacetate process
A solution based processes using metal trifluoroacetate (TFA) precursors is being developed for commercialization of Yttrium Barium Copper Oxide (YBCO) coated conductors. This nonvacuum technique uses inexpensive precursors and has the advantage of easy scalability, ease of composition control, elim...
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Veröffentlicht in: | IEEE transactions on applied superconductivity 2005-06, Vol.15 (2), p.2638-2641 |
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description | A solution based processes using metal trifluoroacetate (TFA) precursors is being developed for commercialization of Yttrium Barium Copper Oxide (YBCO) coated conductors. This nonvacuum technique uses inexpensive precursors and has the advantage of easy scalability, ease of composition control, eliminates carbonate formation during decomposition, and helps maintain film uniformity during heat treatment. However, fluorine remains incorporated in the YBCO film, depending on process conditions, and may result in a reduction of Jc. An appropriate heat treatment schedule ensures reduction of fluorine in the YBCO films as well as an improvement in microstructural properties. The aim of this work was to investigate the fluorine depth profile, density, and microstructural evolution of metal organic deposited (MOD) YBCO films with heat treatment using focused ion beam (FIB) microscopy, nuclear reaction analysis (NRA), and Rutherford backscattering spectroscopy (RBS). Multilayer structures studied consisted of 0.7 /spl mu/m to 2.0 /spl mu/m-thick YBCO layers deposited on a NiW alloy substrate buffered with CeO/sub 2//YSZ/Y/sub 2/O/sub 3/. |
doi_str_mv | 10.1109/TASC.2005.847688 |
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This nonvacuum technique uses inexpensive precursors and has the advantage of easy scalability, ease of composition control, eliminates carbonate formation during decomposition, and helps maintain film uniformity during heat treatment. However, fluorine remains incorporated in the YBCO film, depending on process conditions, and may result in a reduction of Jc. An appropriate heat treatment schedule ensures reduction of fluorine in the YBCO films as well as an improvement in microstructural properties. The aim of this work was to investigate the fluorine depth profile, density, and microstructural evolution of metal organic deposited (MOD) YBCO films with heat treatment using focused ion beam (FIB) microscopy, nuclear reaction analysis (NRA), and Rutherford backscattering spectroscopy (RBS). Multilayer structures studied consisted of 0.7 /spl mu/m to 2.0 /spl mu/m-thick YBCO layers deposited on a NiW alloy substrate buffered with CeO/sub 2//YSZ/Y/sub 2/O/sub 3/.</description><identifier>ISSN: 1051-8223</identifier><identifier>EISSN: 1558-2515</identifier><identifier>DOI: 10.1109/TASC.2005.847688</identifier><identifier>CODEN: ITASE9</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Backscatter ; Commercialization ; Conductors ; Conductors (devices) ; COPPER OXIDE ; DEPOSITION ; Electric connection. Cables. Wiring ; ELECTRICAL CONDUCTORS ; Electrical engineering. Electrical power engineering ; Electronics ; Exact sciences and technology ; FLUORINE ; FLUORINE COMPOUNDS ; Focused Ion Beam (FIB) ; HEAT TREATING ; Heat treatment ; Ion beams ; Metal Organic Decomposition-Trifluoroacetate (MOD-TFA) ; Microelectronic fabrication (materials and surfaces technology) ; Microscopy ; Microstructure ; MICROSTRUCTURES ; Nuclear Reaction Analysis (NRA) ; Reduction ; Scalability ; Scheduling ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; SUPERCONDUCTORS ; Temperature control ; Trifluoroacetates ; Various equipment and components ; YBCO superconductors ; Yttrium barium copper oxide ; YTTRIUM OXIDE</subject><ispartof>IEEE transactions on applied superconductivity, 2005-06, Vol.15 (2), p.2638-2641</ispartof><rights>2005 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. 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This nonvacuum technique uses inexpensive precursors and has the advantage of easy scalability, ease of composition control, eliminates carbonate formation during decomposition, and helps maintain film uniformity during heat treatment. However, fluorine remains incorporated in the YBCO film, depending on process conditions, and may result in a reduction of Jc. An appropriate heat treatment schedule ensures reduction of fluorine in the YBCO films as well as an improvement in microstructural properties. The aim of this work was to investigate the fluorine depth profile, density, and microstructural evolution of metal organic deposited (MOD) YBCO films with heat treatment using focused ion beam (FIB) microscopy, nuclear reaction analysis (NRA), and Rutherford backscattering spectroscopy (RBS). Multilayer structures studied consisted of 0.7 /spl mu/m to 2.0 /spl mu/m-thick YBCO layers deposited on a NiW alloy substrate buffered with CeO/sub 2//YSZ/Y/sub 2/O/sub 3/.</description><subject>Applied sciences</subject><subject>Backscatter</subject><subject>Commercialization</subject><subject>Conductors</subject><subject>Conductors (devices)</subject><subject>COPPER OXIDE</subject><subject>DEPOSITION</subject><subject>Electric connection. Cables. Wiring</subject><subject>ELECTRICAL CONDUCTORS</subject><subject>Electrical engineering. Electrical power engineering</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>FLUORINE</subject><subject>FLUORINE COMPOUNDS</subject><subject>Focused Ion Beam (FIB)</subject><subject>HEAT TREATING</subject><subject>Heat treatment</subject><subject>Ion beams</subject><subject>Metal Organic Decomposition-Trifluoroacetate (MOD-TFA)</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Microscopy</subject><subject>Microstructure</subject><subject>MICROSTRUCTURES</subject><subject>Nuclear Reaction Analysis (NRA)</subject><subject>Reduction</subject><subject>Scalability</subject><subject>Scheduling</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>SUPERCONDUCTORS</subject><subject>Temperature control</subject><subject>Trifluoroacetates</subject><subject>Various equipment and components</subject><subject>YBCO superconductors</subject><subject>Yttrium barium copper oxide</subject><subject>YTTRIUM OXIDE</subject><issn>1051-8223</issn><issn>1558-2515</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqNkc2LFDEQxRtRcF29C16CoHjpsSof3clxHVwVFvbgevAU0ulqyNLTGZO0MP-9aWZhwYN4SoX61avkvaZ5jbBDBPPx7ur7fscB1E7LvtP6SXOBSumWK1RPaw0KW825eN68yPkeAKWW6qIp1_MaU1iIucXNpxxyLUZ2CD7FXNLqy5rczOh3nNcS4sLCwnx0hUb289P-ttbLWKGY2EjHmMPWGE7sQKVOlRSmTT46X--F2DFFTzm_bJ5Nbs706uG8bH5cf77bf21vbr9821_dtF6iKm0_6GkihQS6F6C0Fk4J1GYQgmulhsEMPfRSEgjdgRejGWQ3SD1Ch04KKS6b92fduvfXSrnYQ8ie5tktFNdsuUauwOB_gFANNKaCH_4JYtejEMDFpvn2L_Q-rqmanK1BXr-EcnshnKHN7pxosscUDi6dLILdcrVbrnbL1Z5zrSPvHnRd9m6eklt8yI9zneFSKF65N2cuENFjW0qoy8UfXbWrSA</recordid><startdate>20050601</startdate><enddate>20050601</enddate><creator>Rane, M.V.</creator><creator>Efstathiadis, H.</creator><creator>Bakhru, H.</creator><creator>Rupich, M.W.</creator><creator>Li, X.</creator><creator>Zhang, W.</creator><creator>Kodenkandath, T.</creator><creator>Haldar, P.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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Cables. Wiring</topic><topic>ELECTRICAL CONDUCTORS</topic><topic>Electrical engineering. Electrical power engineering</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>FLUORINE</topic><topic>FLUORINE COMPOUNDS</topic><topic>Focused Ion Beam (FIB)</topic><topic>HEAT TREATING</topic><topic>Heat treatment</topic><topic>Ion beams</topic><topic>Metal Organic Decomposition-Trifluoroacetate (MOD-TFA)</topic><topic>Microelectronic fabrication (materials and surfaces technology)</topic><topic>Microscopy</topic><topic>Microstructure</topic><topic>MICROSTRUCTURES</topic><topic>Nuclear Reaction Analysis (NRA)</topic><topic>Reduction</topic><topic>Scalability</topic><topic>Scheduling</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>SUPERCONDUCTORS</topic><topic>Temperature control</topic><topic>Trifluoroacetates</topic><topic>Various equipment and components</topic><topic>YBCO superconductors</topic><topic>Yttrium barium copper oxide</topic><topic>YTTRIUM OXIDE</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Rane, M.V.</creatorcontrib><creatorcontrib>Efstathiadis, H.</creatorcontrib><creatorcontrib>Bakhru, H.</creatorcontrib><creatorcontrib>Rupich, M.W.</creatorcontrib><creatorcontrib>Li, X.</creatorcontrib><creatorcontrib>Zhang, W.</creatorcontrib><creatorcontrib>Kodenkandath, T.</creatorcontrib><creatorcontrib>Haldar, P.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Ceramic Abstracts</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Copper Technical Reference Library</collection><collection>Materials Research Database</collection><collection>Aerospace Database</collection><jtitle>IEEE transactions on applied superconductivity</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Rane, M.V.</au><au>Efstathiadis, H.</au><au>Bakhru, H.</au><au>Rupich, M.W.</au><au>Li, X.</au><au>Zhang, W.</au><au>Kodenkandath, T.</au><au>Haldar, P.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fluorine analysis and microstructural evolution in coated YBCO conductor deposited by metal trifluoroacetate process</atitle><jtitle>IEEE transactions on applied superconductivity</jtitle><stitle>TASC</stitle><date>2005-06-01</date><risdate>2005</risdate><volume>15</volume><issue>2</issue><spage>2638</spage><epage>2641</epage><pages>2638-2641</pages><issn>1051-8223</issn><eissn>1558-2515</eissn><coden>ITASE9</coden><abstract>A solution based processes using metal trifluoroacetate (TFA) precursors is being developed for commercialization of Yttrium Barium Copper Oxide (YBCO) coated conductors. This nonvacuum technique uses inexpensive precursors and has the advantage of easy scalability, ease of composition control, eliminates carbonate formation during decomposition, and helps maintain film uniformity during heat treatment. However, fluorine remains incorporated in the YBCO film, depending on process conditions, and may result in a reduction of Jc. An appropriate heat treatment schedule ensures reduction of fluorine in the YBCO films as well as an improvement in microstructural properties. The aim of this work was to investigate the fluorine depth profile, density, and microstructural evolution of metal organic deposited (MOD) YBCO films with heat treatment using focused ion beam (FIB) microscopy, nuclear reaction analysis (NRA), and Rutherford backscattering spectroscopy (RBS). Multilayer structures studied consisted of 0.7 /spl mu/m to 2.0 /spl mu/m-thick YBCO layers deposited on a NiW alloy substrate buffered with CeO/sub 2//YSZ/Y/sub 2/O/sub 3/.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/TASC.2005.847688</doi><tpages>4</tpages></addata></record> |
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subjects | Applied sciences Backscatter Commercialization Conductors Conductors (devices) COPPER OXIDE DEPOSITION Electric connection. Cables. Wiring ELECTRICAL CONDUCTORS Electrical engineering. Electrical power engineering Electronics Exact sciences and technology FLUORINE FLUORINE COMPOUNDS Focused Ion Beam (FIB) HEAT TREATING Heat treatment Ion beams Metal Organic Decomposition-Trifluoroacetate (MOD-TFA) Microelectronic fabrication (materials and surfaces technology) Microscopy Microstructure MICROSTRUCTURES Nuclear Reaction Analysis (NRA) Reduction Scalability Scheduling Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices SUPERCONDUCTORS Temperature control Trifluoroacetates Various equipment and components YBCO superconductors Yttrium barium copper oxide YTTRIUM OXIDE |
title | Fluorine analysis and microstructural evolution in coated YBCO conductor deposited by metal trifluoroacetate process |
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