Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength

An issue in microfabrication of the fluidic channels in glass/poly (dimethyl siloxane) (PDMS) is the absence of a well-defined study of the bonding strength between the surfaces making up these channels. Although most of the research papers mention the use of oxygen plasma for developing chemical (s...

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Veröffentlicht in:	Journal of microelectromechanical systems 2005-06, Vol.14 (3), p.590-597
Hauptverfasser:	Bhattacharya, S., Datta, A., Berg, J.M., Gangopadhyay, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Advancing contact angle Applied fluid mechanics Biosensors Bond strength Bonding Bonding strength Channels Chemicals Contact angle Exact sciences and technology Fluid dynamics Fluidic microsystems Fluidics Fundamental areas of phenomenology (including applications) Gages Gauges Glass hydrophilicity hydrophobicity Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Microfluidics Micromechanical devices and systems oxygen-plasma Physics Plasma Plasma applications Plasma chemistry Plasma measurements poly (dimethyl) siloxane (PDMS) reactive ion etching (RIE) Silicone resins Siloxanes Studies Surface treatment Wettability
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