Self-assembled monolayer-assisted thin metal polishing for fabricating uniform 3D microstructures
A self-assembled monolayer (SAM) was actively used to improve the reproducibility and yield of micromachining technology. A harsh metal mechanical polishing process was replaced with a metal wet etching process by using a hexadecanethiol (HDT) SAM as an etch-protect mask. The fundamental results of...
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| Veröffentlicht in: | Journal of micromechanics and microengineering 2005-05, Vol.15 (5), p.1027-1032 |
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| container_issue | 5 |
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| container_title | Journal of micromechanics and microengineering |
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| creator | Chang, Sung-Il Choi, Yun-Seok Yoon, Jun-Bo |
| description | A self-assembled monolayer (SAM) was actively used to improve the reproducibility and yield of micromachining technology. A harsh metal mechanical polishing process was replaced with a metal wet etching process by using a hexadecanethiol (HDT) SAM as an etch-protect mask. The fundamental results of the experiment show the excellent ability of the HDT SAM in protecting the gold from the gold wet etchant and the wide process margin. The proposed process, which was used to fabricate a 3D suspended inductor, greatly improves the process yield. The proposed micromachining technology with a SAM is expected to have a variety of applications for the highly reproducible and uniform fabrication of MEMS. |
| doi_str_mv | 10.1088/0960-1317/15/5/019 |
| format | Article |
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The proposed micromachining technology with a SAM is expected to have a variety of applications for the highly reproducible and uniform fabrication of MEMS.</description><identifier>ISSN: 0960-1317</identifier><identifier>EISSN: 1361-6439</identifier><identifier>DOI: 10.1088/0960-1317/15/5/019</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Applied sciences ; Electronics ; Exact sciences and technology ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Mechanical engineering. Machine design ; Mechanical instruments, equipment and techniques ; Microelectronic fabrication (materials and surfaces technology) ; Micromechanical devices and systems ; Physics ; Precision engineering, watch making ; Semiconductor electronics. Microelectronics. Optoelectronics. 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Machine design</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Micromechanical devices and systems</subject><subject>Physics</subject><subject>Precision engineering, watch making</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. 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| ispartof | Journal of micromechanics and microengineering, 2005-05, Vol.15 (5), p.1027-1032 |
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| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices |
| title | Self-assembled monolayer-assisted thin metal polishing for fabricating uniform 3D microstructures |
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