CMOS monolithic mechatronic microsystem for surface imaging and force response studies

We report on a standalone single-chip (7 mm /spl times/10mm) atomic force microscopy (AFM) unit including a fully integrated array of cantilevers, each of which has individual actuation, detection, and control units so that standard AFM operations can be performed only by means of the chip without a...

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Veröffentlicht in:	IEEE journal of solid-state circuits 2005-04, Vol.40 (4), p.951-959
Hauptverfasser:	Barrettino, D., Hafizovic, S., Volden, T., Sedivy, J., Kirstein, K.-U., Hierlemann, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Atomic force microscopy Chips Circuit properties CMOS CMOS technology CMOS-based microsystem Compensation Costs Design. Technologies. Operation analysis. Testing Digital Digital filters Electric, optical and optoelectronic circuits Electronic circuits Electronics Exact sciences and technology Force control Force measurement force sensors Integrated circuit technology Integrated circuits Mechatronics MEMS Micro- and nanoelectromechanical devices (mems/nems) Microelectronic fabrication (materials and surfaces technology) Micromachining Nanostructure Proportional integral derivative Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Signal convertors Signal resolution
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