Scum-free patterning of SU-8 resist for electroforming applications

A simple approach is developed to obtain scum-free pattern transfer in SU-8 resist by UV-lithography for electroforming applications. SU-8 is an epoxy-based negative resist used in the fabrication of high-aspect ratio microstructures. SU-8 resist poses considerable processing difficulties and tends...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2005-01, Vol.15 (1), p.130-135
Hauptverfasser:	Agarwal, M, Gunasekaran, R A, Coane, P, Varahramyan, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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