Composition, structure and mechanical property analysis of DC sputtered CNi and CNxNi nano-composite layers

Carbon–nickel (CNi) and carbon‐nitride–nickel (CNxNi) films were deposited onto native SiO2 covered Si substrates by DC magnetron sputtering from a graphite–nickel composite target using Ar or N2 for sputtering at about 2.6 Pa. The substrate temperature varied between 25 and 800°C. The structure,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Surface and interface analysis 2004-08, Vol.36 (8), p.760-764
Hauptverfasser:	Ujvári, T., Tóth, A., Kovács, Gy. J., Sáfrán, G., Geszti, O., Radnóczi, G., Bertóti, I.
Format:	Artikel
Sprache:	eng
Schlagworte:	CNxNi Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology CNi Exact sciences and technology friction HRTEM nano-composites nano-hardness Physics thin films
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!