Fabrication and performance testing of a steady thermocapillary pump with no moving parts

Pumping in microdevices due to gradients in surface tension was investigated experimentally. Devices exhibiting the Marangoni effect in square channels were designed and fabricated from one silicon substrate and one quartz substrate. The two substrates were aligned, bonded and packaged for testing....

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Bibliographische Detailangaben
Hauptverfasser:	Debar, M.J., Liepmann, D.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Applied fluid mechanics Bonding Exact sciences and technology Fabrication Fluid dynamics Fluid flow control Fluid flow measurement Fluidics Fundamental areas of phenomenology (including applications) Packaging Physics Pressure measurement Silicon Surface tension Testing Time measurement
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