RF MEMS switches and applications
RF MEMS are small mechanical devices fabricated by photolithographic processes, which are used for elemental signal processing functions in rf and microwave frequency circuits. The most common RF MEMS control component is a microwave transmission line switch, currently under development for applicat...
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| creator | Newman, H.S. |
| description | RF MEMS are small mechanical devices fabricated by photolithographic processes, which are used for elemental signal processing functions in rf and microwave frequency circuits. The most common RF MEMS control component is a microwave transmission line switch, currently under development for applications requiring low insertion loss, high linearity, moderate switching speeds, and low to moderate power. The RF MEMS switch promises integration onto a variety of substrates, including substrates bearing active semiconductor devices. This paper will discuss some aspects of the operation of RF MEMS switches and how they may be inserted into microwave circuitry to best advantage. |
| doi_str_mv | 10.1109/RELPHY.2002.996618 |
| format | Conference Proceeding |
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The most common RF MEMS control component is a microwave transmission line switch, currently under development for applications requiring low insertion loss, high linearity, moderate switching speeds, and low to moderate power. The RF MEMS switch promises integration onto a variety of substrates, including substrates bearing active semiconductor devices. This paper will discuss some aspects of the operation of RF MEMS switches and how they may be inserted into microwave circuitry to best advantage.</description><identifier>ISBN: 0780373529</identifier><identifier>ISBN: 9780780373525</identifier><identifier>DOI: 10.1109/RELPHY.2002.996618</identifier><language>eng</language><publisher>Piscataway NJ: IEEE</publisher><subject>Applied sciences ; Circuit properties ; Distributed parameter circuits ; Electric, optical and optoelectronic circuits ; Electronic circuits ; Electronics ; Exact sciences and technology ; Insertion loss ; Micro- and nanoelectromechanical devices (mems/nems) ; Microwave circuits ; Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits ; Microwave devices ; Microwave frequencies ; Power semiconductor switches ; Power transmission lines ; Radiofrequency microelectromechanical systems ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Signal processing ; Substrates ; Switching, multiplexing, switched capacity circuits</subject><ispartof>2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. 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No.02CH37320)</title><addtitle>RELPHY</addtitle><description>RF MEMS are small mechanical devices fabricated by photolithographic processes, which are used for elemental signal processing functions in rf and microwave frequency circuits. The most common RF MEMS control component is a microwave transmission line switch, currently under development for applications requiring low insertion loss, high linearity, moderate switching speeds, and low to moderate power. The RF MEMS switch promises integration onto a variety of substrates, including substrates bearing active semiconductor devices. This paper will discuss some aspects of the operation of RF MEMS switches and how they may be inserted into microwave circuitry to best advantage.</description><subject>Applied sciences</subject><subject>Circuit properties</subject><subject>Distributed parameter circuits</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Insertion loss</subject><subject>Micro- and nanoelectromechanical devices (mems/nems)</subject><subject>Microwave circuits</subject><subject>Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits</subject><subject>Microwave devices</subject><subject>Microwave frequencies</subject><subject>Power semiconductor switches</subject><subject>Power transmission lines</subject><subject>Radiofrequency microelectromechanical systems</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Signal processing</subject><subject>Substrates</subject><subject>Switching, multiplexing, switched capacity circuits</subject><isbn>0780373529</isbn><isbn>9780780373525</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2002</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo9T01Lw0AQXRBBrf0DPcWDx8TZ3dlN9igltUKKUnvxVCabCa7EGrIB8d8biTiXx_vg8UaIlYRMSnB3-7J63r5mCkBlzlkrizNxBXkBOtdGuQuxjPEdpkMDzupLcbPfJLty95LErzD6N44JnZqE-r4LnsbweYrX4rylLvLyDxfisCkP621aPT08ru-rNCjAMbWuMbWppbe5d8po6QhzQlcAITPU3DC2luREG_mrKjsNRG5QKUbQC3E71_YUPXXtQCcf4rEfwgcN30dp0MkczZRbzbnAzP_2_Kv-AQwsR9M</recordid><startdate>2002</startdate><enddate>2002</enddate><creator>Newman, H.S.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope><scope>IQODW</scope></search><sort><creationdate>2002</creationdate><title>RF MEMS switches and applications</title><author>Newman, H.S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i204t-69d5b5b1c67c925319a47a4980a4ee0bede4f6a10a4d1980a269964ed422e403</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Applied sciences</topic><topic>Circuit properties</topic><topic>Distributed parameter circuits</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electronic circuits</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Insertion loss</topic><topic>Micro- and nanoelectromechanical devices (mems/nems)</topic><topic>Microwave circuits</topic><topic>Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits</topic><topic>Microwave devices</topic><topic>Microwave frequencies</topic><topic>Power semiconductor switches</topic><topic>Power transmission lines</topic><topic>Radiofrequency microelectromechanical systems</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Signal processing</topic><topic>Substrates</topic><topic>Switching, multiplexing, switched capacity circuits</topic><toplevel>online_resources</toplevel><creatorcontrib>Newman, H.S.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection><collection>Pascal-Francis</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Newman, H.S.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>RF MEMS switches and applications</atitle><btitle>2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320)</btitle><stitle>RELPHY</stitle><date>2002</date><risdate>2002</risdate><spage>111</spage><epage>115</epage><pages>111-115</pages><isbn>0780373529</isbn><isbn>9780780373525</isbn><abstract>RF MEMS are small mechanical devices fabricated by photolithographic processes, which are used for elemental signal processing functions in rf and microwave frequency circuits. The most common RF MEMS control component is a microwave transmission line switch, currently under development for applications requiring low insertion loss, high linearity, moderate switching speeds, and low to moderate power. The RF MEMS switch promises integration onto a variety of substrates, including substrates bearing active semiconductor devices. 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| identifier | ISBN: 0780373529 |
| ispartof | 2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320), 2002, p.111-115 |
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| language | eng |
| recordid | cdi_pascalfrancis_primary_15491745 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Applied sciences Circuit properties Distributed parameter circuits Electric, optical and optoelectronic circuits Electronic circuits Electronics Exact sciences and technology Insertion loss Micro- and nanoelectromechanical devices (mems/nems) Microwave circuits Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Microwave devices Microwave frequencies Power semiconductor switches Power transmission lines Radiofrequency microelectromechanical systems Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Signal processing Substrates Switching, multiplexing, switched capacity circuits |
| title | RF MEMS switches and applications |
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