Hermeticity and stiction in MEMS packaging

Exposure of operating MEMS structures to atmospheric gasses may have deleterious effects on device performance. Here we consider from a phenomenological point of view the effects that moisture has on both short- and long-term performance characteristics of Texas Instruments' Digital Micromirror...

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Hauptverfasser: Jacobs, S.J., Miller, S.A., Malone, J.J., McDonald, W.C., Lopes, V.C., Magel, L.K.
Format: Tagungsbericht
Sprache:eng
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