Hermeticity and stiction in MEMS packaging

Exposure of operating MEMS structures to atmospheric gasses may have deleterious effects on device performance. Here we consider from a phenomenological point of view the effects that moisture has on both short- and long-term performance characteristics of Texas Instruments' Digital Micromirror...

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Hauptverfasser: Jacobs, S.J., Miller, S.A., Malone, J.J., McDonald, W.C., Lopes, V.C., Magel, L.K.
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Miller, S.A.
Malone, J.J.
McDonald, W.C.
Lopes, V.C.
Magel, L.K.
description Exposure of operating MEMS structures to atmospheric gasses may have deleterious effects on device performance. Here we consider from a phenomenological point of view the effects that moisture has on both short- and long-term performance characteristics of Texas Instruments' Digital Micromirror Device (DMD). As an array of up to 1.3 million mirrors, a single DMD can provide a wealth of statistical information; compilations of device statistics provide thorough descriptions of effects that may be obtained through static or operational aging with a variety of package environments. The detection sensitivity of our test methods provides significant insight into the global and local effects of package environment, including the effects of water on device operation.
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identifier ISBN: 0780373529
ispartof 2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320), 2002, p.136-139
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subjects Adhesives
Applied sciences
Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
Electronics
Exact sciences and technology
Jacobian matrices
Magnesium compounds
Micro- and nanoelectromechanical devices (mems/nems)
Microelectromechanical devices
Micromechanical devices
Micromirrors
Mirrors
Moisture
Packaging
Production
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Testing, measurement, noise and reliability
title Hermeticity and stiction in MEMS packaging
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