Hermeticity and stiction in MEMS packaging
Exposure of operating MEMS structures to atmospheric gasses may have deleterious effects on device performance. Here we consider from a phenomenological point of view the effects that moisture has on both short- and long-term performance characteristics of Texas Instruments' Digital Micromirror...
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creator | Jacobs, S.J. Miller, S.A. Malone, J.J. McDonald, W.C. Lopes, V.C. Magel, L.K. |
description | Exposure of operating MEMS structures to atmospheric gasses may have deleterious effects on device performance. Here we consider from a phenomenological point of view the effects that moisture has on both short- and long-term performance characteristics of Texas Instruments' Digital Micromirror Device (DMD). As an array of up to 1.3 million mirrors, a single DMD can provide a wealth of statistical information; compilations of device statistics provide thorough descriptions of effects that may be obtained through static or operational aging with a variety of package environments. The detection sensitivity of our test methods provides significant insight into the global and local effects of package environment, including the effects of water on device operation. |
doi_str_mv | 10.1109/RELPHY.2002.996625 |
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identifier | ISBN: 0780373529 |
ispartof | 2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320), 2002, p.136-139 |
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subjects | Adhesives Applied sciences Electronic equipment and fabrication. Passive components, printed wiring boards, connectics Electronics Exact sciences and technology Jacobian matrices Magnesium compounds Micro- and nanoelectromechanical devices (mems/nems) Microelectromechanical devices Micromechanical devices Micromirrors Mirrors Moisture Packaging Production Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Testing, measurement, noise and reliability |
title | Hermeticity and stiction in MEMS packaging |
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