Dlc thin film preparation by cathodic arc deposition with a super droplet-free system

Bibliographische Detailangaben

Hauptverfasser:	TAKIKAWA, Hirofumi, IZUMI, Kikuko, MIYANO, Ryuichi, SAKAKIBARA, Tateki
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Vacuum deposition
Online-Zugang:	Volltext
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