Large area PLD of nanometer-multilayers

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Hauptverfasser: DIETSCH, R, HOLZ, Th, WEISSBACH, D, SCHOLZ, R
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HOLZ, Th
WEISSBACH, D
SCHOLZ, R
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identifier ISSN: 0169-4332
ispartof Applied surface science, 2002, Vol.197-98, p.169-174
issn 0169-4332
1873-5584
language eng
recordid cdi_pascalfrancis_primary_14002368
source Elsevier ScienceDirect Journals Complete
subjects Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Laser deposition
Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
title Large area PLD of nanometer-multilayers
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