Tailored a-C:H coatings by nanostructuring and alloying

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Hauptverfasser:	HAUERT, R, KNOBLAUCH-MEYER, L, FRANCZ, G, SCHROEDER, A, WINTERMANTEL, E
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
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creator	HAUERT, R KNOBLAUCH-MEYER, L FRANCZ, G SCHROEDER, A WINTERMANTEL, E
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format	Conference Proceeding
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identifier	ISSN: 0257-8972
ispartof	Surface & coatings technology, 1999, Vol.120-21, p.291-296
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source	Elsevier ScienceDirect Journals Complete
subjects	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
title	Tailored a-C:H coatings by nanostructuring and alloying
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