Surface acoustic wave methods to determine the anisotropic elastic properties of thin films

We have developed experimental and analytical methods to measure the anisotropic elastic properties of thin supported films. In this approach, SAWs were generated using a line-focused laser. Waves with frequency components up to 400 MHz were detected by a Michelson interferometer. Dispersion relatio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Measurement science & technology 2001-09, Vol.12 (9), p.1486-1494
Hauptverfasser:	Hurley, D C, Tewary, V K, Richards, A J
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic instruments, equipment, and techniques Acoustical measurements and instrumentation Acoustics Exact sciences and technology Fundamental areas of phenomenology (including applications) Physics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!