Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts

An experimental apparatus has been built to measure the elastic modulus and bending strength (modulus of rupture) of LIGA nickel posts. The apparatus uses the static cantilever beam bending approach to measure mechanical properties in a direction parallel to the growth direction. Experimental result...

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Veröffentlicht in:	Journal of microelectromechanical systems 2001-09, Vol.10 (3), p.347-359
Hauptverfasser:	Stephens, L.S., Kelly, K.W., Simhadri, S., McCandless, A.B., Meletis, E.I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Baths Bending strength Crystal microstructure Elastic moduli Elasticity Electron beams Errors Exact sciences and technology Failure analysis Focusing Fundamental areas of phenomenology (including applications) Grain size Grain size and shape Industrial metrology. Testing Ion beams Materials testing Measurement and testing methods Measurement methods and techniques in continuum mechanics of solids Mechanical engineering. Machine design Mechanical factors Mechanical properties Mechanical variables measurement Microhardness Modulus of elasticity Nickel Physics Plating baths Precision engineering, watch making Scanning electron microscopy Solid mechanics Statistical analysis Structural and continuum mechanics Structural beams Studies
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