Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts
An experimental apparatus has been built to measure the elastic modulus and bending strength (modulus of rupture) of LIGA nickel posts. The apparatus uses the static cantilever beam bending approach to measure mechanical properties in a direction parallel to the growth direction. Experimental result...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2001-09, Vol.10 (3), p.347-359 |
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| creator | Stephens, L.S. Kelly, K.W. Simhadri, S. McCandless, A.B. Meletis, E.I. |
| description | An experimental apparatus has been built to measure the elastic modulus and bending strength (modulus of rupture) of LIGA nickel posts. The apparatus uses the static cantilever beam bending approach to measure mechanical properties in a direction parallel to the growth direction. Experimental results are presented for two sets of largely identical posts constructed using an overplating method. One set was electroplated using a Watts bath, and the other set was electroplated using a sulfamate bath. For the Watts bath, the measured modulus of elasticity was slightly lower than that of bulk nickel (182 GPa), while, for the sulfamate bath, it was approximately half (93 GPa). The strength properties of the two sets of posts also differ dramatically. Microhardness measurements, Focused Ion Beam (FIB) images of grain structure, and scanning electron microscopy (SEM) micrographs of failure regions are used to further characterize and explain the differences in the results. This integrated testing approach yields a consistent set of data regarding material properties, grain size/structure and failure mechanisms. Potential sources of experimental error are also identified and improvements in experiment design are suggested to reduce these errors. |
| doi_str_mv | 10.1109/84.946780 |
| format | Article |
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The apparatus uses the static cantilever beam bending approach to measure mechanical properties in a direction parallel to the growth direction. Experimental results are presented for two sets of largely identical posts constructed using an overplating method. One set was electroplated using a Watts bath, and the other set was electroplated using a sulfamate bath. For the Watts bath, the measured modulus of elasticity was slightly lower than that of bulk nickel (182 GPa), while, for the sulfamate bath, it was approximately half (93 GPa). The strength properties of the two sets of posts also differ dramatically. Microhardness measurements, Focused Ion Beam (FIB) images of grain structure, and scanning electron microscopy (SEM) micrographs of failure regions are used to further characterize and explain the differences in the results. This integrated testing approach yields a consistent set of data regarding material properties, grain size/structure and failure mechanisms. Potential sources of experimental error are also identified and improvements in experiment design are suggested to reduce these errors.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/84.946780</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Baths ; Bending strength ; Crystal microstructure ; Elastic moduli ; Elasticity ; Electron beams ; Errors ; Exact sciences and technology ; Failure analysis ; Focusing ; Fundamental areas of phenomenology (including applications) ; Grain size ; Grain size and shape ; Industrial metrology. Testing ; Ion beams ; Materials testing ; Measurement and testing methods ; Measurement methods and techniques in continuum mechanics of solids ; Mechanical engineering. Machine design ; Mechanical factors ; Mechanical properties ; Mechanical variables measurement ; Microhardness ; Modulus of elasticity ; Nickel ; Physics ; Plating baths ; Precision engineering, watch making ; Scanning electron microscopy ; Solid mechanics ; Statistical analysis ; Structural and continuum mechanics ; Structural beams ; Studies</subject><ispartof>Journal of microelectromechanical systems, 2001-09, Vol.10 (3), p.347-359</ispartof><rights>2001 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2001</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c525t-c6017074f5f053a51bb12cc2863c0ae61453c0a2a910c899bad0d3b62c7f9b63</citedby><cites>FETCH-LOGICAL-c525t-c6017074f5f053a51bb12cc2863c0ae61453c0a2a910c899bad0d3b62c7f9b63</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/946780$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/946780$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=1091031$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Stephens, L.S.</creatorcontrib><creatorcontrib>Kelly, K.W.</creatorcontrib><creatorcontrib>Simhadri, S.</creatorcontrib><creatorcontrib>McCandless, A.B.</creatorcontrib><creatorcontrib>Meletis, E.I.</creatorcontrib><title>Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>An experimental apparatus has been built to measure the elastic modulus and bending strength (modulus of rupture) of LIGA nickel posts. The apparatus uses the static cantilever beam bending approach to measure mechanical properties in a direction parallel to the growth direction. Experimental results are presented for two sets of largely identical posts constructed using an overplating method. One set was electroplated using a Watts bath, and the other set was electroplated using a sulfamate bath. For the Watts bath, the measured modulus of elasticity was slightly lower than that of bulk nickel (182 GPa), while, for the sulfamate bath, it was approximately half (93 GPa). The strength properties of the two sets of posts also differ dramatically. Microhardness measurements, Focused Ion Beam (FIB) images of grain structure, and scanning electron microscopy (SEM) micrographs of failure regions are used to further characterize and explain the differences in the results. This integrated testing approach yields a consistent set of data regarding material properties, grain size/structure and failure mechanisms. Potential sources of experimental error are also identified and improvements in experiment design are suggested to reduce these errors.</description><subject>Applied sciences</subject><subject>Baths</subject><subject>Bending strength</subject><subject>Crystal microstructure</subject><subject>Elastic moduli</subject><subject>Elasticity</subject><subject>Electron beams</subject><subject>Errors</subject><subject>Exact sciences and technology</subject><subject>Failure analysis</subject><subject>Focusing</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Grain size</subject><subject>Grain size and shape</subject><subject>Industrial metrology. Testing</subject><subject>Ion beams</subject><subject>Materials testing</subject><subject>Measurement and testing methods</subject><subject>Measurement methods and techniques in continuum mechanics of solids</subject><subject>Mechanical engineering. Machine design</subject><subject>Mechanical factors</subject><subject>Mechanical properties</subject><subject>Mechanical variables measurement</subject><subject>Microhardness</subject><subject>Modulus of elasticity</subject><subject>Nickel</subject><subject>Physics</subject><subject>Plating baths</subject><subject>Precision engineering, watch making</subject><subject>Scanning electron microscopy</subject><subject>Solid mechanics</subject><subject>Statistical analysis</subject><subject>Structural and continuum mechanics</subject><subject>Structural beams</subject><subject>Studies</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2001</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqNks9LHDEUx4fSQq166NVTEGnpYTRv8vso0lphixdPXoY32TcYm51Zkxlh__tm2aWUHtRTvpBPPrz38qrqM_BzAO4urDx3UhvL31UH4CTUHJR9XzJXpjagzMfqU86PnIOUVh9U97_IP-AQPEa2TuOa0rRh9IxxximMA8NhyXoMcU5UMsZNDpmNPfM4TCHSMyVassXN9SUrjt8U2Sr4ohnzlI-qDz3GTMf787C6-_H97upnvbi9vrm6XNReNWqqveZguJG96rkSqKDroPG-sVp4jqRBqm1o0AH31rkOl3wpOt1407tOi8Pq605byn-aKU_tKmRPMeJA45xbB1Irw7V9lTRSg7bKyEJ-eZFsXKNkKfp10ArR2LcYteVG6a3x9D_wcZxTmXzpxAlwCsS2k287qMw650R9u05hhWnTAm-3e9Ba2e72oLBneyHm8st9wsGH_M-DMlcBBTvZYYGI_t7uHX8AWnO4Uw</recordid><startdate>20010901</startdate><enddate>20010901</enddate><creator>Stephens, L.S.</creator><creator>Kelly, K.W.</creator><creator>Simhadri, S.</creator><creator>McCandless, A.B.</creator><creator>Meletis, E.I.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>H8D</scope><scope>KR7</scope><scope>7TC</scope><scope>F28</scope></search><sort><creationdate>20010901</creationdate><title>Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts</title><author>Stephens, L.S. ; Kelly, K.W. ; Simhadri, S. ; McCandless, A.B. ; Meletis, E.I.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c525t-c6017074f5f053a51bb12cc2863c0ae61453c0a2a910c899bad0d3b62c7f9b63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2001</creationdate><topic>Applied sciences</topic><topic>Baths</topic><topic>Bending strength</topic><topic>Crystal microstructure</topic><topic>Elastic moduli</topic><topic>Elasticity</topic><topic>Electron beams</topic><topic>Errors</topic><topic>Exact sciences and technology</topic><topic>Failure analysis</topic><topic>Focusing</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Grain size</topic><topic>Grain size and shape</topic><topic>Industrial metrology. Testing</topic><topic>Ion beams</topic><topic>Materials testing</topic><topic>Measurement and testing methods</topic><topic>Measurement methods and techniques in continuum mechanics of solids</topic><topic>Mechanical engineering. Machine design</topic><topic>Mechanical factors</topic><topic>Mechanical properties</topic><topic>Mechanical variables measurement</topic><topic>Microhardness</topic><topic>Modulus of elasticity</topic><topic>Nickel</topic><topic>Physics</topic><topic>Plating baths</topic><topic>Precision engineering, watch making</topic><topic>Scanning electron microscopy</topic><topic>Solid mechanics</topic><topic>Statistical analysis</topic><topic>Structural and continuum mechanics</topic><topic>Structural beams</topic><topic>Studies</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Stephens, L.S.</creatorcontrib><creatorcontrib>Kelly, K.W.</creatorcontrib><creatorcontrib>Simhadri, S.</creatorcontrib><creatorcontrib>McCandless, A.B.</creatorcontrib><creatorcontrib>Meletis, E.I.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Aerospace Database</collection><collection>Civil Engineering Abstracts</collection><collection>Mechanical Engineering Abstracts</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Stephens, L.S.</au><au>Kelly, K.W.</au><au>Simhadri, S.</au><au>McCandless, A.B.</au><au>Meletis, E.I.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2001-09-01</date><risdate>2001</risdate><volume>10</volume><issue>3</issue><spage>347</spage><epage>359</epage><pages>347-359</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>An experimental apparatus has been built to measure the elastic modulus and bending strength (modulus of rupture) of LIGA nickel posts. The apparatus uses the static cantilever beam bending approach to measure mechanical properties in a direction parallel to the growth direction. Experimental results are presented for two sets of largely identical posts constructed using an overplating method. One set was electroplated using a Watts bath, and the other set was electroplated using a sulfamate bath. For the Watts bath, the measured modulus of elasticity was slightly lower than that of bulk nickel (182 GPa), while, for the sulfamate bath, it was approximately half (93 GPa). The strength properties of the two sets of posts also differ dramatically. Microhardness measurements, Focused Ion Beam (FIB) images of grain structure, and scanning electron microscopy (SEM) micrographs of failure regions are used to further characterize and explain the differences in the results. This integrated testing approach yields a consistent set of data regarding material properties, grain size/structure and failure mechanisms. Potential sources of experimental error are also identified and improvements in experiment design are suggested to reduce these errors.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/84.946780</doi><tpages>13</tpages></addata></record> |
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| subjects | Applied sciences Baths Bending strength Crystal microstructure Elastic moduli Elasticity Electron beams Errors Exact sciences and technology Failure analysis Focusing Fundamental areas of phenomenology (including applications) Grain size Grain size and shape Industrial metrology. Testing Ion beams Materials testing Measurement and testing methods Measurement methods and techniques in continuum mechanics of solids Mechanical engineering. Machine design Mechanical factors Mechanical properties Mechanical variables measurement Microhardness Modulus of elasticity Nickel Physics Plating baths Precision engineering, watch making Scanning electron microscopy Solid mechanics Statistical analysis Structural and continuum mechanics Structural beams Studies |
| title | Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts |
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