Approaches to analyzing insulators with Auger electron spectroscopy: Update and overview

This paper provides an updated overview, intended to be of practical value to analysts, of methods that can be applied to minimize or control the build-up of near-surface electrical charge during electron-induced Auger electron spectroscopy (AES). Although well-developed methods can be highly effect...

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Veröffentlicht in:	Journal of electron spectroscopy and related phenomena 2010, Vol.176 (1), p.80-94
Hauptverfasser:	Baer, D.R., Lea, A.S., Geller, J.D., Hammond, J.S., Kover, L., Powell, C.J., Seah, M.P., Suzuki, M., Watts, J.F., Wolstenholme, J.
Format:	Artikel
Sprache:	eng ; fre ; ger
Schlagworte:	AUGER ELECTRON SPECTROSCOPY DIELECTRIC MATERIALS ELECTRICAL INSULATORS Environmental Molecular Sciences Laboratory MATERIALS SCIENCE MODIFICATIONS Practical guide SAMPLE PREPARATION SPATIAL RESOLUTION Surface analysis Surface charging
Online-Zugang:	Volltext
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