High etching rates of bulk Nb in Ar/Cl2 microwave discharge

Niobium is the material of choice for production of superconducting radio frequency cavities used in linear particle accelerators. In this study, plasma etching of bulk Nb is performed on the surface of disk shaped samples with the goal of eliminating non-superconductive pollutants in the penetratio...

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Veröffentlicht in:	Applied physics letters 2008-05
Hauptverfasser:	Raskovic, Marija, Upadhyay, Janardan, Phillips, H, Valente, Anne-Marie
Format:	Artikel
Sprache:	eng
Schlagworte:	ACCELERATORS CAVITIES ETCHING GLOW DISCHARGES HIGH-FREQUENCY DISCHARGES NIOBIUM PARTICLE ACCELERATORS PENETRATION DEPTH PLASMA POLLUTANTS PRODUCTION
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