Characterization of microstructure and mechanical behavior of sputter deposited Ti-containing amorphous carbon coatings

We report on the characterization of microstructure and mechanical properties of sputter deposited Ti-containing amorphous carbon (Ti-aC) coatings as a function of Ti composition. Ti-aC coatings have been deposited by unbalanced magnetron sputter deposition, in an industrial-scale four-target coatin...

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Veröffentlicht in:	Surface & coatings technology 2001-12, Vol.148 (2), p.153-162
Hauptverfasser:	Feng, B., Cao, D.M., Meng, W.J., Xu, J., Tittsworth, R.C., Rehn, L.E., Baldo, P.M., Doll, G.L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous carbon CARBON COATINGS Cross-disciplinary physics: materials science rheology DEPOSITION Deposition by sputtering Exact sciences and technology FINE STRUCTURE MATERIALS SCIENCE Mechanical behavior MECHANICAL PROPERTIES Methods of deposition of films and coatings film growth and epitaxy MICROSTRUCTURE Nanocomposite Physics RUTHERFORD BACKSCATTERING SPECTROSCOPY TRANSMISSION ELECTRON MICROSCOPY
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