Optical and dielectric properties of CuAl2O4 films synthesized by solid-phase epitaxy

The synthesis and properties of CuAl{sub 2}O{sub 4} thin films have been examined. The CuAl{sub 2}O{sub 4} films were deposited via reactive direct current magnetron sputter using a CuAl{sub 2} target. As-deposited films were amorphous. Post-deposition annealing at high temperature in oxygen yielded...

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Veröffentlicht in:	Thin solid films 2007-06, Vol.515 (17), p.6938-6942
Hauptverfasser:	LEU, L. C, NORTON, D. P, JELLISON, G. E, SELVAMANICKAM, V, XIONG, X
Format:	Artikel
Sprache:	eng
Schlagworte:	ALUMINIUM OXIDES Condensed matter: electronic structure, electrical, magnetic, and optical properties COPPER OXIDES Cross-disciplinary physics: materials science rheology Deposition by sputtering DIELECTRIC PROPERTIES Dielectric thin films Dielectrics, piezoelectrics, and ferroelectrics and their properties ENERGY GAP Exact sciences and technology MAGNESIUM OXIDES MATERIALS SCIENCE Methods of deposition of films and coatings film growth and epitaxy OPACITY Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Physics Solid phase epitaxy growth from solid phases SPUTTERING SUBSTRATES THIN FILMS
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