Synthesis, characterization and surface reactivity of tungsten carbide (WC) PVD films

Phase-pure tungsten carbide (WC) and Pt-modified WC thin films have been synthesized using the physical vapor deposition (PVD) technique. The physical and chemical properties of the PVD films have been studied using high-resolution electron energy loss spectroscopy (HREELS), X-ray photoelectron spec...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Medical physics (Lancaster) 2004-10, Vol.569 (1), p.89-98
Hauptverfasser: Zellner, Michael B., Chen, Jingguang G.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Phase-pure tungsten carbide (WC) and Pt-modified WC thin films have been synthesized using the physical vapor deposition (PVD) technique. The physical and chemical properties of the PVD films have been studied using high-resolution electron energy loss spectroscopy (HREELS), X-ray photoelectron spectroscopy (XPS), temperature programmed desorption (TPD), and near edge X-ray adsorption fine structure (NEXAFS). TPD and HREELS have been utilized to investigate the reactivity of the WC and Pt-modified WC films toward the reaction with cyclohexene. The addition of Pt on the WC surface enhances the selective dehydrogenation pathway to produce gas phase benzene. The results reported here illustrate the feasibility of utilizing TPD and HREELS to investigate the surface chemistry of well-characterized PVD films.
ISSN:0039-6028
0094-2405
1879-2758
2473-4209
DOI:10.1016/j.susc.2004.07.029