Use of Microhotplate Arrays as Microdeposition Substrates for Materials Exploration

An approach for high-throughput rapid screening of chemical vapor deposition (CVD) materials using micromachined silicon microheater arrays is described. To illustrate this approach, titanium dioxide was deposited by CVD, using titanium(IV) nitrate and titanium(IV) isopropoxide at temperatures betwe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Chemistry of materials 2002-04, Vol.14 (4), p.1671-1677
Hauptverfasser:	Taylor, Charles J, Semancik, Steve
Format:	Artikel
Sprache:	eng
Schlagworte:	CHEMISTRY ENVIRONMENTAL SCIENCES Exact sciences and technology EXPLORATION General equipment and techniques INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing SUBSTRATES
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!