Use of Microhotplate Arrays as Microdeposition Substrates for Materials Exploration
An approach for high-throughput rapid screening of chemical vapor deposition (CVD) materials using micromachined silicon microheater arrays is described. To illustrate this approach, titanium dioxide was deposited by CVD, using titanium(IV) nitrate and titanium(IV) isopropoxide at temperatures betwe...
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| Veröffentlicht in: | Chemistry of materials 2002-04, Vol.14 (4), p.1671-1677 |
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| container_title | Chemistry of materials |
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| creator | Taylor, Charles J Semancik, Steve |
| description | An approach for high-throughput rapid screening of chemical vapor deposition (CVD) materials using micromachined silicon microheater arrays is described. To illustrate this approach, titanium dioxide was deposited by CVD, using titanium(IV) nitrate and titanium(IV) isopropoxide at temperatures between 130 and 815 °C. Deposition was confined to the microhotplate elements within 4- and 16-element arrays. Film microstructure was examined by scanning electron microscopy. In situ electrical measurements were made with integrated microcontacts during the deposition of TiO2 using titanium(IV) isopropoxide. A novel approach using temperature-programmed deposition with temperature ramp rates up to 800 °C/s was also employed for microstructure modification during deposition. Additionally, the steep temperature gradients present on the microhotplate supports have been demonstrated to provide an excellent platform for investigating temperature-dependent microstructures. |
| doi_str_mv | 10.1021/cm0108583 |
| format | Article |
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Additionally, the steep temperature gradients present on the microhotplate supports have been demonstrated to provide an excellent platform for investigating temperature-dependent microstructures.</description><subject>CHEMISTRY</subject><subject>ENVIRONMENTAL SCIENCES</subject><subject>Exact sciences and technology</subject><subject>EXPLORATION</subject><subject>General equipment and techniques</subject><subject>INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Physics</subject><subject>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</subject><subject>SUBSTRATES</subject><issn>0897-4756</issn><issn>1520-5002</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNpt0E1PxCAQBmBiNHH9OPgP6sGDh-oAS9s9qlk_EjdqVs-ETiGia2kYTNZ_L5savRgOkJmHIbyMHXE44yD4OX4Ah0Y1cotNuBJQKgCxzSbQzOpyWqtql-0RvQHwzJsJW76QLYIrFh5jeA1pWJlki4sYzRcVhsZ6Z4dAPvnQF8vPllLMhgoXYrHIp-jNior5eliF3MjogO24XLKHP_s-e7meP1_dlvcPN3dXF_elkYqnUlaqhtaKrjPYidZxI2Tnqg4b7GAKM1M7jqgQjZItIFghhJw5W83M1LWNk_vseJwbKHlN6JPFVwx9bzHpRtRKQjano8nfIIrW6SH6DxO_NAe9SUz_JpbtyWgHQ2hWLpoePf1dkFVe040rR-cp2fVv38R3XdWyVvr5canry5vF4-3iWj_9zTVI-i18xj6n8s_73x5sh3A</recordid><startdate>20020401</startdate><enddate>20020401</enddate><creator>Taylor, Charles J</creator><creator>Semancik, Steve</creator><general>American Chemical Society</general><scope>BSCLL</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20020401</creationdate><title>Use of Microhotplate Arrays as Microdeposition Substrates for Materials Exploration</title><author>Taylor, Charles J ; Semancik, Steve</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-a351t-36570be2ddacd2bf1a23df6dc8cd0409a7f1cc5cca53b0c0e22239fe69a4fb8f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>CHEMISTRY</topic><topic>ENVIRONMENTAL SCIENCES</topic><topic>Exact sciences and technology</topic><topic>EXPLORATION</topic><topic>General equipment and techniques</topic><topic>INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Physics</topic><topic>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</topic><topic>SUBSTRATES</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Taylor, Charles J</creatorcontrib><creatorcontrib>Semancik, Steve</creatorcontrib><creatorcontrib>National Institute of Standards and Technology, Gaithersburg, MD (US)</creatorcontrib><collection>Istex</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Chemistry of materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Taylor, Charles J</au><au>Semancik, Steve</au><aucorp>National Institute of Standards and Technology, Gaithersburg, MD (US)</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Use of Microhotplate Arrays as Microdeposition Substrates for Materials Exploration</atitle><jtitle>Chemistry of materials</jtitle><addtitle>Chem. Mater</addtitle><date>2002-04-01</date><risdate>2002</risdate><volume>14</volume><issue>4</issue><spage>1671</spage><epage>1677</epage><pages>1671-1677</pages><issn>0897-4756</issn><eissn>1520-5002</eissn><abstract>An approach for high-throughput rapid screening of chemical vapor deposition (CVD) materials using micromachined silicon microheater arrays is described. To illustrate this approach, titanium dioxide was deposited by CVD, using titanium(IV) nitrate and titanium(IV) isopropoxide at temperatures between 130 and 815 °C. Deposition was confined to the microhotplate elements within 4- and 16-element arrays. Film microstructure was examined by scanning electron microscopy. In situ electrical measurements were made with integrated microcontacts during the deposition of TiO2 using titanium(IV) isopropoxide. A novel approach using temperature-programmed deposition with temperature ramp rates up to 800 °C/s was also employed for microstructure modification during deposition. 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| source | ACS Publications |
| subjects | CHEMISTRY ENVIRONMENTAL SCIENCES Exact sciences and technology EXPLORATION General equipment and techniques INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing SUBSTRATES |
| title | Use of Microhotplate Arrays as Microdeposition Substrates for Materials Exploration |
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