The structure of self-assembled monolayers of alkylsiloxanes on silicon: a comparison of results from ellipsometry and low-angle x-ray reflectivity

The thicknesses of C10-C18 alkylsiloxane monolayers on silicon-silicon dioxide substrates have been measured with ellipsometry and low-angle X-ray reflection. Although, for any given sample, thicknesses measured by the two methods agree to within experimental error, ellipsometric measurements are sy...

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Veröffentlicht in:	Journal of the American Chemical Society 1989-07, Vol.111 (15), p.5852-5861
Hauptverfasser:	Wasserman, Stephen R, Whitesides, George M, Tidswell, Ian M, Ocko, Ben M, Pershan, Peter S, Axe, John D
Format:	Artikel
Sprache:	eng
Schlagworte:	360603 - Materials- Properties 400201 - Chemical & Physicochemical Properties Condensed matter: structure, mechanical and thermal properties DATA DATA ANALYSIS ELEMENTS ELLIPSOMETRY Exact sciences and technology EXPERIMENTAL DATA INFORMATION INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY MATERIALS SCIENCE MEASURING INSTRUMENTS MEASURING METHODS NUMERICAL DATA OPTICAL PROPERTIES PHYSICAL PROPERTIES Physics REFLECTIVITY SEMIMETALS SILICON Solid surfaces and solid-solid interfaces STRUCTURAL CHEMICAL ANALYSIS Surface and interface dynamics and vibrations SURFACE PROPERTIES Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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